我们专注于设计、研发和制造各类先进的高纯高浓度臭氧发生器系统,推动臭氧设备解决方案在光伏,面板,半导体生产领域的应用,为原子层沉积(ALD)、化学气相沉积(CVD)、光刻胶带、晶片清洁、污染物去除、表面调节和氧化物生长等半导体工艺设备提供最佳的臭氧解决方案。
We focus on designing, researching, and manufacturing various advanced high-purity and high-concentration ozone generator systems. We promote ozone equipment solutions in the fields of photovoltaics, panels, and semiconductor production, providing the best ozone solutions for semiconductor process equipment such as ALD, CVD, photolithography, chip cleaning, pollutant removal, surface modification, and oxide growth.